Metal fuse and self-aligned gate edge (sage) architecture having a metal fuse

ABSTRACT

Metal fuses and self-aligned gate edge (SAGE) architectures having metal fuses are described. In an example, an integrated circuit structure includes a plurality of semiconductor fins protruding through a trench isolation region above a substrate. A first gate structure is over a first of the plurality of semiconductor fins. A second gate structure is over a second of the plurality of semiconductor fins. A gate edge isolation structure is laterally between and in contact with the first gate structure and the second gate structure. The gate edge isolation structure is on the trench isolation region and extends above an uppermost surface of the first gate structure and the second gate structure. A metal fuse is on the gate edge isolation structure.

CROSS-REFERENCE TO RELATED APPLICATION

This patent application is a divisional of U.S. patent application Ser. No. 16/347,183, filed May 2, 2019, which is a U.S. National Phase Application under 35 U.S.C. § 371 of International Application No. PCT/US2016/068580, filed Dec. 23, 2016, entitled “METAL FUSE AND SELF-ALIGNED GATE EDGE (SAGE) ARCHITECTURE HAVING A METAL FUSE,” the entire disclosure of which are hereby incorporated by reference in their entirety and for all purposes.

TECHNICAL FIELD

Embodiments of the disclosure are in the field of semiconductor devices and processing and, in particular, metal fuses and self-aligned gate edge (SAGE) architectures having metal fuses.

BACKGROUND

For the past several decades, the scaling of features in integrated circuits has been a driving force behind an ever-growing semiconductor industry. Scaling to smaller and smaller features enables increased densities of functional units on the limited real estate of semiconductor chips. For example, shrinking transistor size allows for the incorporation of an increased number of memory or logic devices on a chip, lending to the fabrication of products with increased capacity. The drive for ever-more capacity, however, is not without issue. The necessity to optimize the performance of each device becomes increasingly significant.

In the manufacture of integrated circuit devices, multi-gate transistors, such as tri-gate transistors, have become more prevalent as device dimensions continue to scale down. In conventional processes, tri-gate transistors are generally fabricated on either bulk silicon substrates or silicon-on-insulator substrates. In some instances, bulk silicon substrates are preferred due to their lower cost and because they enable a less complicated tri-gate fabrication process.

Scaling multi-gate transistors has not been without consequence, however. As the dimensions of these fundamental building blocks of microelectronic circuitry are reduced and as the sheer number of fundamental building blocks fabricated in a given region is increased, the constraints on the lithographic processes used to pattern these building blocks have become overwhelming. In particular, there may be a trade-off between the smallest dimension of a feature patterned in a semiconductor stack (the critical dimension) and the spacing between such features. Additionally, the constraints on including passive features among active devices have increased.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a plan view of a layout including fin-based semiconductor devices accommodating end-to-end spacing.

FIGS. 2A-2D illustrate cross-sectional views of process operations of significance in a conventional finFET or tri-gate process fabrication scheme.

FIGS. 3A-3D illustrate cross-sectional views of process operations of significance in a self-aligned gate edge (SAGE) process fabrication scheme for finFET or tri-gate devices.

FIGS. 4A-4F illustrate cross-sectional views representing various operations in a method of fabricating a semiconductor structure including a self-aligned gate edge (SAGE)-integrated metal fuse, in accordance with an embodiment of the present disclosure.

FIG. 5A is an energy dispersive spectroscopy (EDS) image highlighting metal slivers of a metal fuse structure, in accordance with an embodiment of the present disclosure.

FIG. 5B illustrates a plan view of a semiconductor structure including a self-aligned gate edge (SAGE)-integrated metal fuse, in accordance with an embodiment of the present disclosure.

FIG. 6 illustrates a cross-sectional view of another semiconductor structure including a self-aligned gate edge (SAGE)-integrated metal fuse, as taken through a fin cut perspective, in accordance with another embodiment of the present disclosure.

FIG. 7 illustrates a cross-sectional view of another semiconductor structure including a self-aligned gate edge (SAGE)-integrated metal fuse, as taken through a fin cut perspective, in accordance with another embodiment of the present disclosure.

FIG. 8A illustrates a cross-sectional view of a non-planar semiconductor device having self-aligned gate edge isolation integrated with a self-aligned gate edge (SAGE)-integrated metal fuse, in accordance with an embodiment of the present disclosure.

FIG. 8B illustrates a plan view taken along the a-a′ axis of the structure of FIG. 8A, in accordance with an embodiment of the present disclosure.

FIGS. 9A-9C illustrate cross-sectional views of process operations of significance in another self-aligned gate edge process fabrication scheme for finFET or tri-gate devices, in accordance with an embodiment of the present disclosure.

FIG. 10 illustrates a computing device in accordance with one implementation of an embodiment of the present disclosure.

FIG. 11 illustrates an interposer that includes one or more embodiments of the present disclosure.

DESCRIPTION OF THE EMBODIMENTS

Metal fuses and self-aligned gate edge (SAGE) architectures having metal fuses, are described. In the following description, numerous specific details are set forth, such as specific integration and material regimes, in order to provide a thorough understanding of embodiments of the present disclosure. It will be apparent to one skilled in the art that embodiments of the present disclosure may be practiced without these specific details. In other instances, well-known features, such as integrated circuit design layouts, are not described in detail in order to not unnecessarily obscure embodiments of the present disclosure. Furthermore, it is to be appreciated that the various embodiments shown in the Figures are illustrative representations and are not necessarily drawn to scale.

Certain terminology may also be used in the following description for the purpose of reference only, and thus are not intended to be limiting. For example, terms such as “upper”, “lower”, “above”, and “below” refer to directions in the drawings to which reference is made. Terms such as “front”, “back”, “rear”, and “side” describe the orientation and/or location of portions of the component within a consistent but arbitrary frame of reference which is made clear by reference to the text and the associated drawings describing the component under discussion. Such terminology may include the words specifically mentioned above, derivatives thereof, and words of similar import.

One or more embodiments are directed to the fabrication of metal fuses using self-aligned gate endcap (SAGE) architecture. In an embodiment, such metal fuses are implanted as a fundamental component of a system-on-chip (SoC) technology. In a particular embodiment, a metal fuse is formed by first forming a tapered plug in a local interconnect in a SAGE architecture.

To provide context, fuses are used for overcurrent protection for sensitive circuits as well as for disabling transistors by disconnecting them from their neighbors, effecting programming. There are two types of fuses to be considered. A first fuse type involves fuses based on heat dissipation. The principle is that a sufficiently high current is passed through the fuse which is fabricated from a conductive material. Since conductors in integrated circuit structures typically have a finite resistance, the resulting heat dissipation is proportional to the square of the current passing through. At a sufficiently high current, the conductive material (e.g., metal) is melted and no longer conducts, providing for fuse ‘blowing.’ One limitation is that as CMOS technology is aggressively scaled below the 14 nm node, lower program currents may be desired for fuses. This may require that the resistance of the fuse be relatively higher, which may be achieved primarily by cross-section scaling to guarantee control. Such scaling is determined by metal line width definition (e.g., using lithography) which can be a very expensive technique.

A second fuse type involves fuses based on electro-migration. When different metals are stacked together, the resulting lattice may be non-uniform and susceptible to damage from momentum transfer between conducting electrons and metal ions. One limitation is that electro-migration is for device reliability. Accordingly, modern CMOS metal interconnects are designed to mitigate such an effect. Thus, higher program currents may be need for fuse programing. The program is proportional to overlap area which may again be a lithography issue, where critical dimension (CD) and registration concerns may contribute to non-uniformity.

In accordance with embodiments described herein, self-aligned gate edge (SAGE)-integrated metal fuses are described. As a foundation, one or more embodiments of the present disclosure are directed to semiconductor structures or devices having one or more gate edge structures e.g., as gate isolation regions) of gate electrodes of the semiconductor structures or devices. One or more embodiments are directed to the fabrication of local interconnects for such gate electrode structures. Additionally, methods of fabricating gate edge isolation structures in a self-aligned manner are also described. In one or more embodiments, self-aligned gate edge structures are fabricated for logic transistors based on complementary metal oxide semiconductor (CMOS) devices.

To provide context, scaling of gate endcap and trench contact (TCN) endcap regions are important contributors towards improving transistor layout area and density. Gate and TCN endcap regions refer to gate and TCN overlap of the diffusion region/fins of semiconductor devices. As an example, FIG. 1 illustrates a plan view of a layout 100 including fin-based semiconductor devices accommodating end-to-end spacing. Referring to FIG. 1, first 102 and second 104 semiconductor devices are based on semiconductor fins 106 and 108, respectively. Each device 102 and 104 has a gate electrode 110 or 112, respectively. Additionally, each device 102 and 104 has trench contacts (TCNs) 114 and 116, respectively, at source and drain regions of the fins 106 and 108, respectively The gate electrodes 110 and 112 and the TCNs 114 and 116 each have an end cap region, which is located off of the corresponding fins 106 and 108, respectively.

Referring again to FIG. 1, typically, gate and TCN endcap dimensions must include an allowance for mask registration error to ensure robust transistor operation for worst case mask mis-registration, leaving an end-to-end spacing 118. Thus, another important design rule critical to improving transistor layout density is the spacing between two adjacent endcaps facing each other. However, the parameters of “2*Endcap+End-to-End Spacing” are becoming increasingly difficult to scale using lithographic patterning to meet the scaling requirements for new technologies. In particular, the additional endcap length required to allow for mask registration error also increases gate capacitance values due to longer overlap length between TCN and gate electrodes, thereby increasing product dynamic energy consumption and degrading performance. Previous solutions have focused on improving registration budget and patterning or resolution improvements to enable shrinkage of both endcap dimension and endcap-to-endcap spacing.

In accordance with an embodiment of the present disclosure, approaches are described which provide for self-aligned gate endcap and TCN overlap of a semiconductor fin without any need to allow for mask registration. In one such embodiment, a disposable spacer is fabricated on the semiconductor fin edges which determines the gate endcap and the contact overlap dimensions. The spacer defined endcap process enables the gate and TCN endcap regions to be self-aligned to the semiconductor fin and, therefore, does not require extra endcap length to account for mask mis-registration. Furthermore, approaches described herein do not require lithographic patterning at previously required stages since the gate and TCN endcap/overlap dimensions remain fixed, leading to improvement (i.e., reduction) in device to device variability in electrical parameters.

In order to provide a side-by-side comparison, FIGS. 2A-2D illustrate cross-sectional views of process operations of significance in a conventional finFET or tri-gate process fabrication scheme, while FIGS. 3A-3D illustrate cross-sectional views of process operations of significance in a self-aligned gate edge (SAGE) process fabrication scheme for finFET or tri-gate devices, in accordance with an embodiment of the present disclosure.

Referring to FIGS. 2A and 3A, a bulk semiconductor substrate 200 or 300, such as a bulk single crystalline silicon substrate is provided having fins 202 or 302, respectively, etched therein. In an embodiment, the fins are formed directly in the bulk substrate 200 or 300 and, as such, are formed continuous with the bulk substrate 200 or 300. It is to be appreciated that within the substrate 200 or 300, shallow trench isolation structures may be formed between fins. Referring to FIG. 3A, a hardmask layer 304, such as a silicon nitride hardmask layer, and a pad oxide layer 306, such as a silicon dioxide layer, remain atop fins 302 following patterning to form the fins 302. By contrast, referring to FIG. 2A, such a hardmask layer and pad oxide layer have been removed.

Referring to FIG. 2B, a dummy or permanent gate dielectric layer 210 is formed on the exposed surfaces of the semiconductor fins 202, and a dummy gate layer 212 is formed over the resulting structure. By contrast, referring to FIG. 3B, a dummy or permanent gate dielectric layer 310 is formed on the exposed surfaces of the semiconductor fins 302, and dummy spacers 312 are formed adjacent to the resulting structure.

Referring to FIG. 2C, gate endcap cut patterning is performed and isolation regions 214 are formed at the resulting patterned dummy gate ends 216. In the conventional process scheme, a larger gate endcap must be fabricated to allow for gate mask mis-registration, as depicted by the arrowed regions 218. By contrast, referring to FIG. 3C, self-aligned isolation regions 314 are formed by providing an isolation layer over the structure of FIG. 3B, e.g., by deposition and planarization. In one such embodiment, the self-aligned gate endcap process does not require extra space for mask registration, as compared in FIGS. 2C and 3C.

Referring to FIG. 2D, the dummy gate electrode 212 of FIG. 2C is replaced with permanent gate electrodes. In the case of use of a dummy gate dielectric layer, such a dummy gate dielectric layer may also be replaced by a permanent gate dielectric layer in this process. In the specific example shown, a dual metal gate replacement process is performed to provide an N-type gate electrode 220 over a first semiconductor fin 202A and to provide a P-type gate electrode 222 over a second semiconductor fin 202B. The N-type gate electrode 220 and the P-type gate electrode 222 are formed between the gate edge isolations structures 214, but form a P/N junction 224 where they meet. The exact location of the P/N junction 224 may vary, depending on mis-registration, as depicted by the arrowed region 226.

By contrast, referring to FIG. 3D, the hardmask layer 304 and pad oxide layer 306 are removed, and the dummy spacers 314 of FIG. 3C are replaced with permanent gate electrodes. In the case of use of a dummy gate dielectric layer, such a dummy gate dielectric layer may also be replaced by a permanent gate dielectric layer in this process. In the specific example shown, a dual metal gate replacement process is performed to provide an N-type gate electrode 320 over a first semiconductor fin 302A and to provide a P-type gate electrode 322 over a second semiconductor fin 302B. The N-type gate electrode 320 and the P-type gate electrode 322 are formed between, and are also separated by, the gate edge isolations structures 314.

Referring again to FIG. 2D, a local interconnect 240 may be fabricated to contact N-type gate electrode 220 and P-type gate electrode 322 to provide a conductive path around the P/N junction 224. Likewise, referring to FIG. 3D, a local interconnect 340 may be fabricated to contact N-type gate electrode 320 and P-type gate electrode 322 to provide a conductive path over the intervening isolation structure 314 there between. Referring to both FIGS. 2D and 3D, a hardmask 242 or 342 may be formed on the local interconnect 240 or 340, respectively.

Referring to FIG. 3D in particular, in an embodiment, the continuity of the local interconnect 340 is interrupted by a dielectric plug 350 in cases where a break in electrical contact along a gate line are needed. As used, herein, the term “plug” is used to refer to a non-conductive space or interruption of a metal or otherwise conductive structure, such as an interruption of a local interconnect feature.

In accordance with one or more embodiments of the present disclosure, a self-aligned gate endcap (SAGE) processing scheme involves the formation of gate/trench contact endcaps self-aligned to fins without requiring an extra length to account for mask mis-registration. Thus, embodiments may be implemented to enable shrinking of transistor layout area. Furthermore, a flexible fin-height (e.g., multi Hsi) process may enable independent optimization of different cells for power and performance. An integrated process flow enabling both features may be implemented to meet scaling and performance challenges for future CMOS technology. Embodiments described herein may involve the fabrication of gate edge isolation structures, which may also be referred to as gate walls or SAGE walls.

In accordance with one or more embodiments of the present disclosure, an integrated metal fuse is fabricated within a highly-scaled SAGE transistor architecture. It is to be appreciated that traditional fuses either add process cost or complexity, or suffer from high variation due to variations in the fabrication processes used. By contrast, in an embodiment, fabrication of a SAGE-integrated metal fuse enables a cost-neutral and low variation alternative to known approaches.

Embodiments described below may be implemented to take advantage of elevated resistance of metal lines in gate metal to enable fuse fabrication with a controllable metal thickness of less than approximately 5 nm. Such fuse architectures may render possible the use of very low program currents. Fuse programming may be based on heat dissipation where current is introduced to melt thin metal lines. Such thin metal lines, or metal slivers, may be very thin and defined by self-aligned etches and depositions in order to achieve minimal thickness of the metal fuse feature.

It is to be appreciated that programming current is typically controlled by the cross-section of the fuse, which may be limited by lithography patterning capability and CD control. The cross-section for metal fuses describe herein may be: (1) controlled by a dry recess etch, and/or (2) aggressively scaled far below direct printing lithography capability currently in use. Additionally, the metal melt may be confined by the dielectric material, or “plug,” formed on all sides minimizing collateral damage to nearby structures.

In an exemplary metal fuse fabrication process, FIGS. 4A-4F illustrate cross-sectional views representing various operations in a method of fabricating a semiconductor structure including a self-aligned gate edge (SAGE)-integrated metal fuse, in accordance with an embodiment of the present disclosure.

Referring to FIG. 4A, a starting structure 400 includes an inter-layer dielectric (ILD) layer 404 formed over a gate edge isolation structure 402. The ILD layer 404 includes trenches 406, e.g., lines of trenches, formed therein and exposing portions of the gate edge isolation structure 402. In one embodiment, dielectric spacers 408 are along sidewalls of each of the trenches 406. In one embodiment, the starting structure 400 represents a stage in a fabrication where dummy gate structures have been removed in a replacement gate process. The gate structures in locations off of the gate edge isolation structure 402 may have been filled with metal gate material and recessed. The recessing leaves empty trenches 406 above the gate edge isolation structure 402. However, a gate insulating cap may not have yet been formed. In one embodiment, the gate edge isolation structure 402 is a self-aligned gate edge (SAGE) structure formed above a substrate.

Referring to FIG. 4B, a blocking layer 410 is formed in the plurality of gate trenches 406 in the ILD layer 404. In one embodiment, the blocking layer 410 is a carbon-based material deposited using a spin-on process, which may be followed by a planarization process. First hardmask 412 and second hardmask 414 layer may be formed on the blocking layer to facilitate patterning of the blocking layer 410.

Referring to FIG. 4C, the blocking layer 410 is removed from one of the plurality of gate trenches 406, such as the middle trench of FIG. 4C, to form an opening 416. In one embodiment, the process of removing the blocking layer 410 from the middle trench leaves slivers 418 which are a residual portion of the blocking layer 410 remaining along the sidewalls of the middle gate trench 406 or, if present, along the dielectric spacers 408 along the sidewalls of the middle gate trench 406.

In an embodiment, opening 416 is formed using a high aspect ratio dry etch process. In one such embodiment, the etch process provides a driven etch taper to leave slivers 418 which may be disposable. In an example where blocking layer 410 is a carbon-based spin-on material, the blocking layer 410 is etched with a highly anisotropic process employing etching techniques to ensure vertical profiles. The dry etch leaves slivers of the carbon-based spin-on material at the bottom of the opened trench due to the high aspect ratio. In one embodiment, the slivers 418 of the blocking layer 410 have a tapered profile with a thinner upper portion and slightly wider lower portion.

Referring to FIG. 4D, a dielectric layer 420 is formed in opening 416 in the middle gate trench 406. In one embodiment, the dielectric layer 420 is formed adjacent to the slivers 418 of the residual portion of the blocking layer 410. The dielectric layer 420 may represent a dielectric “plug” feature that, if not for slivers 418, would completely fill select ones of the gate trenches 406 to provide an electrical discontinuity between conductive features. In one embodiment, the dielectric layer 420 is formed at the same time that other complete dielectric plugs are being formed elsewhere on the integrated circuit structure. Additionally or alternatively, the dielectric layer 420 may be formed during the formation of gate insulating capping layers. In one embodiment, the dielectric layer 420 is formed using a deposition and planarization process.

Referring to FIG. 4E, remaining portions of the blocking layer 410 and hardmask layers 412 and 414 are removed. In particular, the blocking layer 410 is removed from trenches 406 adjacent to the middle trench, while the dielectric layer 420 is retained. In an embodiment, the process used to remove the remaining portions of the blocking layer 410 also removes the slivers 418 to form voids 422. In one such embodiment, an ash process is used to remove the remaining portions of the blocking layer 410 and the slivers 418.

Referring to FIG. 4F, a conductive material is formed in the voids 422 between the dielectric layer 420 and the sidewalls of the middle gate trench 406. In one such embodiment, the conductive material completely fills the voids 422 to form metal slivers 426 having substantially the same size and geometry as the voids 422. In a particular such embodiment, the metal slivers 426 each have a tapered profile with a thinner upper portion and slightly wider lower portion. In an embodiment, the metal slivers 426 are confined to the middle trench 406 by the dielectric layer 420 to provide a metal fuse 428. In an embodiment, the metal fuses 426 are formed using an atomic layer deposition (ALD process). In one such embodiment, the metal slivers are composed of titanium nitride (TiN) or tungsten (W). In an embodiment, the process used to form the metal fuse 428 can be viewed as an intentionally failed plug process, since conductive slivers 426 remain inside of a trench 406 that may otherwise be targeted from dielectric plug formation.

Referring again to FIG. 4F, local interconnects 424 are formed in the adjacent, opened, trenches 406, e.g., the two outer trenches of FIG. 4F. Such local interconnects 424 may each couple a pair of gate structures formed on the sides of the gate edge isolation structure 402. In an embodiment, the metal of the local interconnects 424 is formed at the same time as the metal slivers 426 of the metal fuse 428. In an embodiment, the metal of the local interconnects 424 is formed from a same material as the metal slivers 426 of the metal fuse 428.

As a representative approach to detect metal slivers such as those described in association with FIG. 4F, FIG. 5A is an energy dispersive spectroscopy (EDS) image 500 highlighting metal slivers of a metal fuse structure, in accordance with an embodiment of the present disclosure. The metal slivers are seen as the metal signals 502 in the EDS image 500.

More specifically, in accordance with one or more embodiments of the present disclosure, a topographical feature of a SAGE transistor architecture is used as an embedded metal fuse. For example, in a SAGE architecture, local interconnects (LI) are typically used to connect adjacent transistors by routing metal over the SAGE walls which are isolating the transistors. In one embodiment, a metal fuse is fabricated on a SAGE wall. In a specific embodiment, such an approach enables very high density integration of a passive component such as a metal fuse.

In an exemplary implementation, FIG. 5B illustrates a plan view of a semiconductor structure 550 including a self-aligned gate edge (SAGE)-integrated metal fuse, in accordance with an embodiment of the present disclosure. By way of reference, FIG. 4F is the cross-sectional view corresponding to the axis shown in FIG. 5B. Furthermore, it is to be appreciated that the plan view shown in FIG. 5B is effectively planarized down to a level corresponding with the height of the axis shown in FIG. 4F, in order to highlight the location of the metal slivers of the metal fuse structure.

Referring to FIG. 5B, integrated circuit structure 550 includes a gate edge isolation structure 402 (such as a SAGE structure or SAGE wall). A metal fuse 428 is on the gate edge isolation structure 402. The metal fuse 428 includes a pair of metal slivers 426 along sidewalls of a trench in an inter-layer dielectric (ILD) layer (not shown in FIG. 5B, but is shown in FIG. 4F) above the gate edge isolation structure 402. In an embodiment, the metal fuse 428 further includes a dielectric plug 420 in the trench and adjacent to the pair of metal slivers 426. In a particular embodiment, the pair of metal slivers 426 includes titanium nitride (TiN) or tungsten (W).

In an embodiment, integrated circuit structure 550 further includes an anode and cathode pair 502 electrically coupled to the metal fuse 428. In an embodiment, the anode and cathode pair 502 is coupled to the metal fuse 428 outside of the perimeter of the gate edge isolation structure 402, from a plan view perspective, as is shown. In one such embodiment, the anode and cathode pair 502 is coupled to the metal fuse 428 by portions of the metal fuse 428 extending beyond the outside of the perimeter of the gate edge isolation structure 402, as is also depicted. In other embodiments, however, the anode and cathode pair 502 is coupled to the metal fuse 428 inside of the perimeter of the gate edge isolation structure 402, an exemplary structure of which is shown in FIG. 8A.

In an embodiment, first and second ends of the metal fuse 428 (e.g., ends where the anode and cathode pair 502 are located) are coupled to first and second gate structures, exemplary architectures of which are described in association with FIGS. 6, 7 and 8A. In one such embodiment, the first gate structure is over a first single semiconductor fin or plurality of semiconductor fins. The second gate structure is over a second single semiconductor fin or plurality of semiconductor fins. Accordingly, the gate edge isolation structure 428 is, in one embodiment, laterally between and in contact with first and second gate structures. In a specific embodiment, the metal fuse 428 is electrically coupled to one or both of the first gate structure and the second gate structure. In a particular embodiment, the metal fuse 428 is electrically coupled to one or both of the first gate structure or the second gate structure by a corresponding local interconnect on the first gate structure or the second gate structure, examples of which are described below.

Referring again to FIG. 5B, and corresponding to FIG. 4F, in an embodiment, an adjacent line having a local interconnect 424 and an anode and cathode pair 506 is also on the gate edge isolation structure 402. In an embodiment, portions of the local interconnect 424 extending outside the perimeter of the gate edge isolation structure 402 are on and electrically couple gate structures on both sides of the gate edge isolation structure 402, exemplary architectures of which are shown in FIGS. 6, 7 and 8A.

Accordingly, in an embodiment, a metal fuse 428 is laterally adjacent to the local interconnect 424, e.g., as formed over a same gate edge isolation structure 402. In one embodiment, the gate edge isolation structure 402 is a self-aligned gate edge (SAGE) isolation structure. In one embodiment, the local interconnect 424 and the metal fuse 428 (e.g., metal slivers 426 of the metal fuse 428) include a same metal.

Thus, in accordance with an embodiment of the present disclosure, a metal fuse 428 is formed from metal slivers 426 formed above a SAGE wall 402. It is to be appreciated that metal fuses may be critical components for CMOS base and system-on-chip (SoC) technologies and may be subject to the same density and scaling constraints. In an embodiment, the above processes and architectures enable the ability to fabricate aggressively scaled, low current, high precision fuses without additional lithography operations using state-of-the-art SAGE architectures.

In another aspect, the SAGE wall on which a metal fuse is fabricated may be a SAGE wall that is slightly or substantially embedded in an isolation regions separating adjacent fins of a semiconductor structure. Additionally, or alternatively, the SAGE wall on which a metal fuse is fabricated may be a SAGE wall composed of more than one dielectric layer.

In a first example involving recess of a multi-layer SAGE wall, FIG. 6 illustrates a cross-sectional view of another semiconductor structure including a self-aligned gate edge (SAGE)-integrated metal fuse, as taken through a fin cut perspective, in accordance with another embodiment of the present disclosure.

Referring to FIG. 6, a plurality of fins 602 is protruding from a substrate 600. Each of the plurality of fins 602 has an upper portion 604 and a lower portion 606. The upper portions 604 are between but lower than gate edge isolation structures (gate walls) 608. Also, the upper portions 604 are above an uppermost surface 610 of a trench isolation region 612. Although shown as retained in FIG. 6, it is to be appreciated that a top fin hardmask 614 can be removed prior to or during gate structure 616 formation. That is, top fin hardmask 614 may be removed to provide a tri-gate finFET device, or may ultimately be retained to provide a double gate finFET device.

Each of the SAGE walls 608 includes an upper layer 620 and a lower layer 622. The lower layer 622 of each of the SAGE walls 608 is slightly embedded in isolation region 612, below the uppermost surface 610 of the isolation region 612. The upper layer 620 of each SAGE wall 608 may include one or more of a local interconnect 630, a dielectric plug 632 or a metal fuse 634 formed thereon. An exemplary structure is shown with a metal fuse 634 shown formed on one of the SAGE walls 608.

Referring again to FIG. 6, in an embodiment, the SAGE process flow follows a conventional FINFET flow through fin patterning and shallow trench isolation (STI) recess. Subsequently, disposable spacers are deposited around the fins to define the gate endcap size. This is followed by filling the end-to-end space with a low dielectric constant material (e.g., SiN/SiOCN) and an etch resistant cap (e.g. metal oxides), which together form the SAGE wall. In one embodiment, the dielectric constant of the wall core (lower portion 622) is low to minimize fringe capacitance, and the top of the wall (upper portion 622 has an etch resistant cap to minimize wall erosion during downstream processing. A SAGE planarization or polish operation defines the height of the wall above fin. After the SAGE polish operation, the disposable spacers are removed. A gate stack is then formed and subsequently recessed to a height below the height of the gate edge isolation structures 608. In another embodiment, the gate stack is first processed through a replacement gate process and then ultimately subjected to a recessing to a height below the height of the gate edge isolation structures 608. In either case, in accordance with an embodiment of the present disclosure, following subsequent processing, the plurality of gate edge isolation structures 608 breaks a continuity of the gate stack or ultimate permanent gate structure into segments, as shown in FIG. 6. A local interconnect layer is then formed over the gate structure and over the plurality of gate edge isolation. The local interconnect electrically connects one or more segments of the gate structure. In one embodiment, the method further includes forming a one or more dielectric plugs that break a continuity of the local interconnect and/or forming one or more incomplete dielectric plugs to form metal slivers for metal fuse fabrication.

In a second example involving recess of a multi-layer SAGE wall, FIG. 7 illustrates a cross-sectional view of another semiconductor structure including a self-aligned gate edge (SAGE)-integrated metal fuse, as taken through a fin cut perspective, in accordance with another embodiment of the present disclosure.

Referring to FIG. 7, a plurality of fins 702 is protruding from a substrate 700. Each of the plurality of fins 702 has an upper portion 704 and a lower portion 706. The upper portions 704 are between but lower than gate edge isolation structures (gate walls) 708. Also, the upper portions 704 are above an uppermost surface 710 of a trench isolation region 712. Although shown as retained in FIG. 7, it is to be appreciated that a top fin hardmask 714 can be removed prior to or during gate structure 716 formation. That is, top fin hardmask 714 may be removed to provide a tri-gate finFET device, or may ultimately be retained to provide a double gate finFET device.

Each of the SAGE walls 708 includes an upper layer 720 and a lower layer 722. The lower layer 722 of each of the SAGE walls 08 is substantially embedded in isolation region 712, below the uppermost surface 710 of the isolation region 712. The upper layer 720 of each SAGE wall 708 may include one or more of a local interconnect 730, a dielectric plug 732 or a metal fuse 734 formed thereon. An exemplary structure is shown with a metal fuse 734 shown formed on one of the SAGE walls 708.

Referring again to FIG. 7, in an embodiment, the SAGE process flow involves the fabrication of disposable dielectric spacers immediately after fin patterning. This is followed by SAGE wall film deposition and SAGE polish. It is to be appreciated that STI polish may not be needed in this flow, since the isolation region 712 is fabricated after spacer definition. In one embodiment, the SAGE wall is buried deep into STI and, thus, SAGE wall integrity may be improved. A gate stack is then formed and subsequently recessed to a height below the height of the gate edge isolation structures 708. In another embodiment, the gate stack is first processed through a replacement gate process and then ultimately subjected to a recessing to a height below the height of the gate edge isolation structures 708. In either case, in accordance with an embodiment of the present disclosure, following subsequent processing, the plurality of gate edge isolation structures 708 breaks a continuity of the gate stack or ultimate permanent gate structure into segments, as shown in FIG. 7. A local interconnect layer is then formed over the gate structure and over the plurality of gate edge isolation. The local interconnect electrically connects one or more segments of the gate structure. In one embodiment, the method further includes forming a one or more dielectric plugs that break a continuity of the local interconnect and/or forming one or more incomplete dielectric plugs to form metal slivers for metal fuse fabrication.

More generally, one or more embodiments described herein provide an avenue for area scaling, reducing capacitance, and/or eliminating various critical front end masks, such as gate cut masks. In one such embodiment the width of a minimum transistor can be reduced by up to 30% by implementing one or more of the approaches describe herein. The smaller transistor size reduces the capacitance between the gate and TCN and other parasitic capacitances. In one embodiment, no extra mask steps are needed to create the endcaps, contacts and local interconnect lines so the many masks needed for such features in the standard process are eliminated.

More specifically, key features of one or more embodiments described above may include one or more of: (1) the gate endcap is the distance from the fin edge to the isolation edge. This distance is defined by the spacer width and is the same size for all transistors. No lithographic patterning is needed to define the endcap so there is no need to allow for mask registration in the endcap; (2) The TCN overlap of the fin is determined by the spacer width and is also not affected by mask registration; (3) The local interconnect lines are self-aligned to the gate and TCN by utilizing the gate patterning lines above the transistor isolation walls. Embodiments may be applicable to the 7 nm node generation, e.g., to improve transistor layout density and gate capacitance (dynamic energy and performance improvement) and reduce total mask count.

It is to be appreciated that the structures resulting from the above exemplary processing schemes may be used in a same or similar form for subsequent processing operations to complete device fabrication, such as PMOS and NMOS device fabrication. As an example of a completed device, FIG. 8A illustrates a cross-sectional view of a non-planar semiconductor device having self-aligned gate edge isolation integrated with a self-aligned gate edge (SAGE)-integrated metal fuse, in accordance with an embodiment of the present disclosure. FIG. 8B illustrates a plan view taken along the a-a′ axis of the structure of FIG. 8A, in accordance with an embodiment of the present disclosure.

Referring to FIG. 8A, a semiconductor structure or device 800 includes a non-planar active regions (e.g., a fin structures including protruding fin portion 804 and sub-fin region 805) formed from substrate 802, and within isolation region 806. In an embodiment, the fin structures are a plurality of fin lines that form a grating structure such as a tight pitch grating structure. In one such embodiment, the tight pitch is not achievable directly through conventional lithography. For example, a pattern based on conventional lithography may first be formed, but the pitch may be halved by the use of spacer mask patterning, as is known in the art. Even further, the original pitch may be quartered by a second round of spacer mask patterning. Accordingly, grating-like fin patterns may have lines spaced at a constant pitch and having a constant width. The pattern may be fabricated by a pitch halving or pitch quartering, or other pitch division, approach.

Gate structures 808 are disposed over the protruding portions 804 of the non-planar active regions as well as over a portion of the isolation region 806. As shown, gate structures 808 include a gate electrode 850 and a gate dielectric layer 852. In one embodiment, although not shown, gate structures 808 may also include a dielectric cap layer.

Gate structures 808 are separated by narrow self-aligned gate edge (SAGE) isolation structures or walls 820 or wide SAGE isolation structures or walls 821. In an embodiment, each of the SAGE walls 820 and 821 is recessed below an uppermost surface 897 of the isolation region 806, as is depicted in FIG. 8A. Each SAGE wall 820 or 821 may include one or more of a local interconnect 854, a dielectric plug 899 or a metal fuse 826 formed thereon. An exemplary structure is shown with a metal fuse 826 formed on the wide SAGE wall 821. The metal fuse 826 may have a structure as described above for metal fuse 428 of FIGS. 4F and 5B. An anode and cathode contact pair 830 may be electrically connected to the metal fuse 826. In the particular embodiment shown, the anode and cathode contact pair 830 is formed over the SAGE wall 821. However, in other embodiments, the anode and cathode contact pair 830 is formed outside the perimeter of the SAGE wall 821, such as the arrangement shown in FIG. 5B. It is to be appreciated that the SAGE wall 821 may further be adjacent to a second gate structure, enabling coupling of the metal fuse 826 to the gate structure on the left-hand side of SAGE wall 821 (e.g., through local interconnect 854), as is depicted, as well as to a second gate structure to the right-hand side of SAGE wall 821.

A gate contact 814, and overlying gate contact via 816 are also seen from this perspective, along with an overlying metal interconnect 860, all of which are disposed in inter-layer dielectric stacks or layers 870. Also seen from the perspective of FIG. 8A, the gate contact 814 is, in one embodiment, disposed over the non-planar active regions. As is also depicted in FIG. 8A, an interface 880 exists between a doping profile of protruding fin portions 804 and sub-fin regions 805, although other embodiments do not include such an interface in doping profile between these regions.

Referring to FIG. 8B, the gate structures 808 are shown as disposed over the protruding fin portions 804, as isolated by self-aligned gate edge isolation structures 820 and 821. In an embodiment, the gate structures 808 form one line of a plurality of parallel gate lines that form a grating structure such as a tight pitch grating structure. In one such embodiment, the tight pitch is not achievable directly through conventional lithography. For example, a pattern based on conventional lithography may first be formed, but the pitch may be halved by the use of spacer mask patterning, as is known in the art. Even further, the original pitch may be quartered by a second round of spacer mask patterning. Accordingly, grating-like gate patterns may have lines spaced at a constant pitch and having a constant width. The pattern may be fabricated by a pitch halving or pitch quartering, or other pitch division, approach.

Referring again to FIG. 8B, source and drain regions 804A and 804B of the protruding fin portions 804 are shown in this perspective, although it is to be appreciated that these regions would be overlapped with trench contact structures. In one embodiment, the source and drain regions 804A and 804B are doped portions of original material of the protruding fin portions 804. In another embodiment, the material of the protruding fin portions 804 is removed and replaced with another semiconductor material, e.g., by epitaxial deposition. In either case, the source and drain regions 804A and 804B may extend below the height of dielectric layer 806, i.e., into the sub-fin region 805.

In an embodiment, the semiconductor structure or device 800 is a non-planar device such as, but not limited to, a finFET or a tri-gate device. In such an embodiment, a corresponding semiconducting channel region is composed of or is formed in a three-dimensional body. In one such embodiment, the gate structures 808 surround at least a top surface and a pair of sidewalls of the three-dimensional body.

Substrate 802 may be composed of a semiconductor material that can withstand a manufacturing process and in which charge can migrate. In an embodiment, substrate 802 is a bulk substrate composed of a crystalline silicon, silicon/germanium or germanium layer doped with a charge carrier, such as but not limited to phosphorus, arsenic, boron or a combination thereof to form active region 804. In one embodiment, the concentration of silicon atoms in bulk substrate 802 is greater than 97%. In another embodiment, bulk substrate 802 is composed of an epitaxial layer grown atop a distinct crystalline substrate, e.g. a silicon epitaxial layer grown atop a boron-doped bulk silicon mono-crystalline substrate. Bulk substrate 802 may alternatively be composed of a group III-V material. In an embodiment, bulk substrate 802 is composed of a III-V material such as, but not limited to, gallium nitride, gallium phosphide, gallium arsenide, indium phosphide, indium antimonide, indium gallium arsenide, aluminum gallium arsenide, indium gallium phosphide, or a combination thereof. In one embodiment, bulk substrate 802 is composed of a III-V material and the charge-carrier dopant impurity atoms are ones such as, but not limited to, carbon, silicon, germanium, oxygen, sulfur, selenium or tellurium.

Isolation region 806 may be composed of a material suitable to ultimately electrically isolate, or contribute to the isolation of, portions of a permanent gate structure from an underlying bulk substrate or isolate active regions formed within an underlying bulk substrate, such as isolating fin active regions. For example, in one embodiment, the isolation region 806 is composed of a dielectric material such as, but not limited to, silicon dioxide, silicon oxy-nitride, silicon nitride, or carbon-doped silicon nitride.

Self-aligned gate edge isolation structures 820 and 821 may be composed of a material or materials suitable to ultimately electrically isolate, or contribute to the isolation of, portions of permanent gate structures from one another. Exemplary materials or material combinations include a single material structure such as silicon dioxide, silicon oxy-nitride, silicon nitride, or carbon-doped silicon nitride. Other exemplary materials or material combinations include a multi-layer stack having lower portion silicon dioxide, silicon oxy-nitride, silicon nitride, or carbon-doped silicon nitride and an upper portion higher dielectric constant material such as hafnium oxide.

Gate structures 808 may be composed of a gate electrode stack which includes a gate dielectric layer 852 and a gate electrode layer 850. In an embodiment, the gate electrode of the gate electrode stack is composed of a metal gate and the gate dielectric layer is composed of a high-k material. For example, in one embodiment, the gate dielectric layer is composed of a material such as, but not limited to, hafnium oxide, hafnium oxy-nitride, hafnium silicate, lanthanum oxide, zirconium oxide, zirconium silicate, tantalum oxide, barium strontium titanate, barium titanate, strontium titanate, yttrium oxide, aluminum oxide, lead scandium tantalum oxide, lead zinc niobate, or a combination thereof. Furthermore, a portion of gate dielectric layer may include a layer of native oxide formed from the top few layers of the substrate 802. In an embodiment, the gate dielectric layer is composed of a top high-k portion and a lower portion composed of an oxide of a semiconductor material. In one embodiment, the gate dielectric layer is composed of a top portion of hafnium oxide and a bottom portion of silicon dioxide or silicon oxy-nitride. In an embodiment, the top high-k portion consists of a “U”-shaped structure that includes a bottom portion substantially parallel to the surface of the substrate and two sidewall portions that are substantially perpendicular to the top surface of the substrate.

In one embodiment, the gate electrode is composed of a metal layer such as, but not limited to, metal nitrides, metal carbides, metal silicides, metal aluminides, hafnium, zirconium, titanium, tantalum, aluminum, ruthenium, palladium, platinum, cobalt, nickel or conductive metal oxides. In a specific embodiment, the gate electrode is composed of a non-workfunction-setting fill material formed above a metal workfunction-setting layer. In some implementations, the gate electrode may consist of a “U”-shaped structure that includes a bottom portion substantially parallel to the surface of the substrate and two sidewall portions that are substantially perpendicular to the top surface of the substrate. In another implementation, at least one of the metal layers that form the gate electrode may simply be a planar layer that is substantially parallel to the top surface of the substrate and does not include sidewall portions substantially perpendicular to the top surface of the substrate. In further implementations of the disclosure, the gate electrode may consist of a combination of U-shaped structures and planar, non-U-shaped structures. For example, the gate electrode may consist of one or more U-shaped metal layers formed atop one or more planar, non-U-shaped layers.

Spacers associated with the gate electrode stacks may be composed of a material suitable to ultimately electrically isolate, or contribute to the isolation of, a permanent gate structure from adjacent conductive contacts, such as self-aligned contacts. For example, in one embodiment, the spacers are composed of a dielectric material such as, but not limited to, silicon dioxide, silicon oxy-nitride, silicon nitride, or carbon-doped silicon nitride.

Local interconnects 854 and metal slivers of metal fuse 826 may be composed of titanium nitride (TiN) or tungsten (W), as described above. It is to be appreciated, however, that other metals may be used for local interconnects 854 and metal slivers of metal fuse 826 in place of, or in combination with, titanium nitride (TiN) or tungsten (W). It is also to be appreciated that a hardmask layer may be disposed on the local interconnects 854 and/or the metal fuse 826 in locations where gate contact 814 or the metal fuse contacts (anode/cathode) 830 are not located thereon.

Gate contact 814, overlying gate contact via 816, overlying metal interconnect 860 and metal fuse contacts (anode/cathode) 830 may be composed of a conductive material. In an embodiment, one or more of the contacts or vias are composed of a metal species. The metal species may be a pure metal, such as tungsten, nickel, or cobalt, or may be an alloy such as a metal-metal alloy or a metal-semiconductor alloy (e.g., such as a silicide material). A common example is the use of copper structures that may or may not include barrier layers (such as Ta or TaN layers) between the copper and surrounding ILD material. As used herein, the term metal includes alloys, stacks, and other combinations of multiple metals. For example, the metal interconnect lines may include barrier layers, stacks of different metals or alloys, etc.

In an embodiment (although not shown), providing structure 800 involves formation of a contact pattern which is essentially perfectly aligned to an existing gate pattern while eliminating the use of a lithographic step with exceedingly tight registration budget. In one such embodiment, this approach enables the use of intrinsically highly selective wet etching (e.g., versus conventionally implemented dry or plasma etching) to generate contact openings. In an embodiment, a contact pattern is formed by utilizing an existing gate pattern in combination with a contact plug lithography operation. In one such embodiment, the approach enables elimination of the need for an otherwise critical lithography operation to generate a contact pattern, as used in conventional approaches. In an embodiment, a trench contact grid is not separately patterned, but is rather formed between poly (gate) lines. For example, in one such embodiment, a trench contact grid is formed subsequent to gate grating patterning but prior to gate grating cuts.

Furthermore, the gate structures 808 may be fabricated by a replacement gate process. In such a scheme, dummy gate material such as polysilicon or silicon nitride pillar material, may be removed and replaced with permanent gate electrode material. In one such embodiment, a permanent gate dielectric layer is also formed in this process, as opposed to being carried through from earlier processing. In an embodiment, dummy gates are removed by a dry etch or wet etch process. In one embodiment, dummy gates are composed of polycrystalline silicon or amorphous silicon and are removed with a dry etch process including use of SF₆. In another embodiment, dummy gates are composed of polycrystalline silicon or amorphous silicon and are removed with a wet etch process including use of aqueous NH₄OH or tetramethylammonium hydroxide. In one embodiment, dummy gates are composed of silicon nitride and are removed with a wet etch including aqueous phosphoric acid.

In an embodiment, one or more approaches described herein contemplate essentially a dummy and replacement gate process in combination with a dummy and replacement contact process to arrive at structure 800. In one such embodiment, the replacement contact process is performed after the replacement gate process to allow high temperature anneal of at least a portion of the permanent gate stack. For example, in a specific such embodiment, an anneal of at least a portion of the permanent gate structures, e.g., after a gate dielectric layer is formed, is performed at a temperature greater than approximately 600 degrees Celsius. The anneal is performed prior to formation of the permanent contacts.

Referring again to FIG. 8A, in an embodiment, a semiconductor device has contact structures that contact portions of a gate electrode formed over an active region. In general, prior to (e.g., in addition to) forming a gate contact structure (such as a via) over an active portion of a gate and in a same layer as a trench contact via, one or more embodiments of the present disclosure include first using a gate aligned trench contact process. Such a process may be implemented to form trench contact structures for semiconductor structure fabrication, e.g., for integrated circuit fabrication. In an embodiment, a trench contact pattern is formed as aligned to an existing gate pattern. By contrast, conventional approaches typically involve an additional lithography process with tight registration of a lithographic contact pattern to an existing gate pattern in combination with selective contact etches. For example, a conventional process may include patterning of a poly (gate) grid with separate patterning of contact features.

It is to be appreciated that, as exemplified in FIGS. 8A and 8B, SAGE walls of varying width may be fabricated, e.g., relatively narrow SAGE walls 820 and relatively wide SAGE walls 821. It is also to be appreciated that fabrication of gate edge isolation structures may lead to formation of a seam within the gate edge isolation structures. It is also to be appreciated that gate edge isolation structures may differ depending on the spacing of adjacent fins. As an example covering both aspects, FIGS. 9A-9C illustrate cross-sectional views of process operations of significance in another self-aligned gate edge process fabrication scheme for finFET or tri-gate devices, in accordance with an embodiment of the present disclosure.

Referring to FIG. 9A, a grouping of fins 900 has a spacing 906. The grouping of fins 900 is adjacent to a fin 902 by a larger spacing 904. Sacrificial spacers 916 are formed adjacent to sidewalls of the upper portions of each of plurality of semiconductor fins 900 and 902.

Referring to FIG. 9B, a plurality of gate edge isolation structures 926 and 950 is formed between the sacrificial spacers 616. In an embodiment, as depicted, each of the plurality of gate edge isolation structures 926 formed between spacings 906 includes a lower dielectric portion 928 and a dielectric cap 930 on the lower dielectric portion 928. In an embodiment, the plurality of gate edge isolation structures 926 is formed by depositing and then recessing a first dielectric material, such as a silicon nitride layer, to provide the lower dielectric portions 928. The deposition process may be a conformal process which, in one embodiment, provides seams 932 within the lower dielectric portion 928. Thus, in an embodiment, each of the plurality of gate edge isolation structures 926 includes a vertical seam 932 centered within the gate edge isolation structure 926. A dielectric cap material, such as a metal oxide material (e.g., hafnium oxide) is then formed in recessed regions above the lower dielectric portions 928. The dielectric cap material may be planarized to form the dielectric cap 930 or may be grown upward to provide the dielectric cap 930 directly.

Referring again to FIG. 9B, in an embodiment, a gate edge isolation structure 926 is between semiconductor fins having a spacing 906 and a gate edge isolation structure 950 is between semiconductor fins having a spacing 904. The gate edge isolation structure 926 has a width narrower than a corresponding width of gate edge isolation structure 950. In one embodiment, the gate edge isolation structure 926 has a total composition different than a total composition of the gate edge isolation structure 950. In one such embodiment, gate edge isolation structure 950 further includes a third dielectric layer 956, such as a layer of silicon oxide on a bottom portion of and within sidewalls of a lower dielectric portion 952. A dielectric cap 952 is further on the third dielectric layer 956. In an embodiment, the sidewalls of the lower dielectric portion 952 have an uppermost surface approximately co-planar with an uppermost surface of the third dielectric layer 956, and the dielectric cap 952 has a substantially planar bottommost surface, as is depicted in FIG. 9B. In another embodiment, the sidewalls of the lower dielectric portion 952 have an uppermost surface below an uppermost surface of the third dielectric layer 956, and the dielectric cap 952 extends further down over the sidewall locations. In yet another embodiment, the sidewalls of the lower dielectric portion 952 have an uppermost surface above an uppermost surface of the third dielectric layer 956, and the dielectric cap 952 extends further down over the third dielectric layer 956.

In an embodiment, the deposition process of layer 956 is a conformal process which, in one embodiment, provides vertical seams 958 within the third dielectric layer 956. However, in another embodiment, a seam 958 is not formed in wider structures but is formed in narrower structures (e.g., seam 932 described above). It is to be appreciated that layers 928 and 952 may be composed of a same material, such as silicon nitride, and formed at a same time as one another. It is also to be appreciated that layers 930 and 954 may be composed of a same material, such as hafnium oxide, and formed at a same time as one another. The third dielectric layer 956 in structure 950 but omitted from structure 926 may be formed by conformal deposition across the entire structure but is excluded from structures 926 since the layer 928 essentially fills the spacing 906 in a first deposition process which does not entirely fill the spacing 904.

Referring to FIG. 9C, the sacrificial spacers 616 are removed. In an embodiment, the sacrificial spacers 616 are removed by a wet etch or dry etch process. In an embodiment, patterning stack layers above the fins are also removed to provide fins 906′ and 902′. Thus, in an embodiment, a gate edge isolation structure includes a vertical seam within the gate edge isolation structure. In an embodiment, gate edge isolation structures differ in width and/or composition depending on the spacing of adjacent fins. In accordance with an embodiment of the present disclosure a metal fuse is subsequently fabricated on one or more of the SAGE walls 926 or 950, e.g., following or during a gate electrode fabrication process.

In an embodiment, as used throughout the present description, interlayer dielectric (ILD) material is composed of or includes a layer of a dielectric or insulating material. Examples of suitable dielectric materials include, but are not limited to, oxides of silicon (e.g., silicon dioxide (SiO₂)), doped oxides of silicon, fluorinated oxides of silicon, carbon doped oxides of silicon, various low-k dielectric materials known in the arts, and combinations thereof. The interlayer dielectric material may be formed by conventional techniques, such as, for example, chemical vapor deposition (CVD), physical vapor deposition (PVD), or by other deposition methods.

In an embodiment, as is also used throughout the present description, metal lines or interconnect line material (and via material) is composed of one or more metal or other conductive structures. A common example is the use of copper lines and structures that may or may not include barrier layers between the copper and surrounding ILD material. As used herein, the term metal includes alloys, stacks, and other combinations of multiple metals. For example, the metal interconnect lines may include barrier layers (e.g., layers including one or more of Ta, TaN, Ti or TiN), stacks of different metals or alloys, etc. Thus, the interconnect lines may be a single material layer, or may be formed from several layers, including conductive liner layers and fill layers. Any suitable deposition process, such as electroplating, chemical vapor deposition or physical vapor deposition, may be used to form interconnect lines. In an embodiment, the interconnect lines are composed of a conductive material such as, but not limited to, Cu, Al, Ti, Zr, Hf, V, Ru, Co, Ni, Pd, Pt, W, Ag, Au or alloys thereof. The interconnect lines are also sometimes referred to in the art as traces, wires, lines, metal, or simply interconnect.

In an embodiment, as is also used throughout the present description, hardmask materials, capping layers, or plugs are composed of dielectric materials different from the interlayer dielectric material. In one embodiment, different hardmask, capping or plug materials may be used in different regions so as to provide different growth or etch selectivity to each other and to the underlying dielectric and metal layers. In some embodiments, a hardmask layer, capping or plug layer includes a layer of a nitride of silicon (e.g., silicon nitride) or a layer of an oxide of silicon, or both, or a combination thereof. Other suitable materials may include carbon-based materials. Other hardmask, capping or plug layers known in the arts may be used depending upon the particular implementation. The hardmask, capping or plug layers maybe formed by CVD, PVD, or by other deposition methods.

In an embodiment, as is also used throughout the present description, lithographic operations are performed using 193 nm immersion litho (i193), EUV and/or EBDW lithography, or the like. A positive tone or a negative tone resist may be used. In one embodiment, a lithographic mask is a trilayer mask composed of a topographic masking portion, an anti-reflective coating (ARC) layer, and a photoresist layer. In a particular such embodiment, the topographic masking portion is a carbon hardmask (CHM) layer and the anti-reflective coating layer is a silicon ARC layer.

Embodiments disclosed herein may be used to manufacture a wide variety of different types of integrated circuits and/or microelectronic devices. Examples of such integrated circuits include, but are not limited to, processors, chipset components, graphics processors, digital signal processors, micro-controllers, and the like. In other embodiments, semiconductor memory may be manufactured. Moreover, the integrated circuits or other microelectronic devices may be used in a wide variety of electronic devices known in the arts. For example, in computer systems (e.g., desktop, laptop, server), cellular phones, personal electronics, etc. The integrated circuits may be coupled with a bus and other components in the systems. For example, a processor may be coupled by one or more buses to a memory, a chipset, etc. Each of the processor, the memory, and the chipset, may potentially be manufactured using the approaches disclosed herein.

FIG. 10 illustrates a computing device 1000 in accordance with one implementation of an embodiment of the present disclosure. The computing device 1000 houses a board 1002. The board 1002 may include a number of components, including but not limited to a processor 1004 and at least one communication chip 1006. The processor 1004 is physically and electrically coupled to the board 1002. In some implementations the at least one communication chip 1006 is also physically and electrically coupled to the board 1002. In further implementations, the communication chip 1006 is part of the processor 1004.

Depending on its applications, computing device 1000 may include other components that may or may not be physically and electrically coupled to the board 1002. These other components include, but are not limited to, volatile memory (e.g., DRAM), non-volatile memory (e.g., ROM), flash memory, a graphics processor, a digital signal processor, a crypto processor, a chipset, an antenna, a display, a touchscreen display, a touchscreen controller, a battery, an audio codec, a video codec, a power amplifier, a global positioning system (GPS) device, a compass, an accelerometer, a gyroscope, a speaker, a camera, and a mass storage device (such as hard disk drive, compact disk (CD), digital versatile disk (DVD), and so forth).

The communication chip 1006 enables wireless communications for the transfer of data to and from the computing device 1000. The term “wireless” and its derivatives may be used to describe circuits, devices, systems, methods, techniques, communications channels, etc., that may communicate data through the use of modulated electromagnetic radiation through a non-solid medium. The term does not imply that the associated devices do not contain any wires, although in some embodiments they might not. The communication chip 1006 may implement any of a number of wireless standards or protocols, including but not limited to Wi-Fi (IEEE 802.11 family), WiMAX (IEEE 802.16 family), IEEE 802.20, long term evolution (LTE), Ev-DO, HSPA+, HSDPA+, HSUPA+, EDGE, GSM, GPRS, CDMA, TDMA, DECT, Bluetooth, derivatives thereof, as well as any other wireless protocols that are designated as 3G, 4G, 5G, and beyond. The computing device 1000 may include a plurality of communication chips 1006. For instance, a first communication chip 1006 may be dedicated to shorter range wireless communications such as Wi-Fi and Bluetooth and a second communication chip 1006 may be dedicated to longer range wireless communications such as GPS, EDGE, GPRS, CDMA, WiMAX, LTE, Ev-DO, and others.

The processor 1004 of the computing device 1000 includes an integrated circuit die packaged within the processor 1004. The integrated circuit die of the processor 1004 may include one or more structures, such as self-aligned gate edge (SAGE)-integrated metal fuses built in accordance with implementations of embodiments of the present disclosure. The term “processor” may refer to any device or portion of a device that processes electronic data from registers and/or memory to transform that electronic data into other electronic data that may be stored in registers and/or memory.

The communication chip 1006 also includes an integrated circuit die packaged within the communication chip 1006. The integrated circuit die of the communication chip 1006 may include one or more structures, such as self-aligned gate edge (SAGE)-integrated metal fuses built in accordance with implementations of embodiments of the present disclosure.

In further implementations, another component housed within the computing device 1000 may contain an integrated circuit die that includes one or structures, such as self-aligned gate edge (SAGE)-integrated metal fuses built in accordance with implementations of embodiments of the present disclosure.

In various implementations, the computing device 1000 may be a laptop, a netbook, a notebook, an ultrabook, a smartphone, a tablet, a personal digital assistant (PDA), an ultra mobile PC, a mobile phone, a desktop computer, a server, a printer, a scanner, a monitor, a set-top box, an entertainment control unit, a digital camera, a portable music player, or a digital video recorder. In further implementations, the computing device 1000 may be any other electronic device that processes data.

FIG. 11 illustrates an interposer 1100 that includes one or more embodiments of the present disclosure. The interposer 1100 is an intervening substrate used to bridge a first substrate 1102 to a second substrate 1104. The first substrate 1102 may be, for instance, an integrated circuit die. The second substrate 1104 may be, for instance, a memory module, a computer motherboard, or another integrated circuit die. Generally, the purpose of an interposer 1100 is to spread a connection to a wider pitch or to reroute a connection to a different connection. For example, an interposer 1100 may couple an integrated circuit die to a ball grid array (BGA) 1106 that can subsequently be coupled to the second substrate 1104. In some embodiments, the first and second substrates 1102/1104 are attached to opposing sides of the interposer 1100. In other embodiments, the first and second substrates 1102/1104 are attached to the same side of the interposer 1100. And in further embodiments, three or more substrates are interconnected by way of the interposer 1100.

The interposer 1100 may be formed of an epoxy resin, a fiberglass-reinforced epoxy resin, a ceramic material, or a polymer material such as polyimide. In further implementations, the interposer may be formed of alternate rigid or flexible materials that may include the same materials described above for use in a semiconductor substrate, such as silicon, germanium, and other group III-V and group IV materials.

The interposer may include metal interconnects 1108 and vias 1110, including but not limited to through-silicon vias (TSVs) 1112. The interposer 1100 may further include embedded devices 1114, including both passive and active devices. Such devices include, but are not limited to, capacitors, decoupling capacitors, resistors, inductors, fuses, diodes, transformers, sensors, and electrostatic discharge (ESD) devices. More complex devices such as radio-frequency (RF) devices, power amplifiers, power management devices, antennas, arrays, sensors, and MEMS devices may also be formed on the interposer 1100. In accordance with embodiments of the disclosure, apparatuses or processes disclosed herein may be used in the fabrication of interposer 1100 or in the fabrication of components included in the interposer 1100.

Thus, embodiments of the present disclosure include metal fuses and self-aligned gate edge (SAGE) architectures having metal fuses.

Example embodiment 1: A semiconductor structure includes a plurality of semiconductor fins protruding through a trench isolation region above a substrate. A first gate structure is over a first of the plurality of semiconductor fins. A second gate structure is over a second of the plurality of semiconductor fins. A gate edge isolation structure is laterally between and in contact with the first gate structure and the second gate structure. The gate edge isolation structure is on the trench isolation region and extends above an uppermost surface of the first gate structure and the second gate structure. A metal fuse is on the gate edge isolation structure.

Example embodiment 2: The integrated circuit structure of example embodiment 1, wherein the metal fuse is electrically coupled to one or both of the first gate structure and the second gate structure.

Example embodiment 3: The integrated circuit structure of example embodiment 1 or 2, wherein the metal fuse is electrically coupled to one or both of the first gate structure or the second gate structure by a corresponding local interconnect on the first gate structure or the second gate structure.

Example embodiment 4: The integrated circuit structure of example embodiment 1, 2 or 3, wherein the metal fuse includes a pair of metal slivers along sidewalls of a trench in an inter-layer dielectric (ILD) layer above the gate edge isolation structure.

Example embodiment 5: The integrated circuit structure of example embodiment 4, wherein the metal fuse further comprises a dielectric plug in the trench and adjacent to the pair of metal slivers.

Example embodiment 6: The integrated circuit structure of example embodiment 4 or 5, wherein the pair of metal slivers includes titanium nitride (TiN) or tungsten (W).

Example embodiment 7: The integrated circuit structure of example embodiment 1, 2, 3, 4, 5 or 6, further including an anode and cathode pair electrically coupled to the metal fuse.

Example embodiment 8: An integrated circuit structure includes one or more semiconductor devices having a plurality of gate structures above a substrate. A local interconnect is on and electrically coupling two or more of the plurality of gate structures. A metal fuse is laterally adjacent to the local interconnect.

Example embodiment 9: The integrated circuit structure of example embodiment 8, wherein the local interconnect and the metal fuse include a same metal.

Example embodiment 10: The integrated circuit structure of example embodiment 8 or 9, wherein the local interconnect and the metal fuse are on a same self-aligned gate edge (SAGE) isolation structure.

Example embodiment 11: The integrated circuit structure of example embodiment 10, wherein the SAGE isolation structure includes an upper dielectric layer on a lower dielectric layer, the upper dielectric layer having a greater dielectric constant than the lower dielectric layer.

Example embodiment 12: The integrated circuit structure of example embodiment 10 or 11, wherein the SAGE isolation structure includes a vertical seam centered within the SAGE isolation structure.

Example embodiment 13: The integrated circuit structure of example embodiment 8 or 9, further including a wide gate edge isolation structure and a narrow gate edge isolation structure, wherein the metal fuse is on the wide gate edge isolation structure.

Example embodiment 14: The integrated circuit structure of example embodiment 8, 9, 10, 11, 12 or 13, wherein the one or more semiconductor devices includes one or more semiconductor fins.

Example embodiment 15: A method of fabricating an integrated circuit structure includes forming a plurality of gate trenches in an inter-layer dielectric (ILD) layer above a self-aligned gate edge (SAGE) structure above a substrate. A blocking layer is formed in the plurality of gate trenches. The blocking layer is removed from one of the plurality of gate trenches, wherein removing the blocking layer includes leaving slivers of a residual portion of the blocking layer along sidewalls of the one of the plurality of gate trenches. A dielectric layer is formed in the one of the plurality of gate trenches and adjacent to the slivers of the residual portion of the blocking layer. The slivers of the residual portion of the blocking layer are removed to provide voids between the dielectric layer and the sidewalls of the one of the plurality of gate trenches. A conductive material is formed in the voids between the dielectric layer and the sidewalls of the one of the plurality of gate trenches.

Example embodiment 16: The method of example embodiment 15, wherein forming a conductive material in the voids between the dielectric layer and the sidewalls of the one of the plurality of gate trenches includes using an atomic layer deposition (ALD) process.

Example embodiment 17: The method of example embodiment 15 or 16, wherein forming the conductive material includes forming a layer of titanium nitride (TiN) or tungsten (W).

Example embodiment 18: The method of example embodiment 15, 16 or 17, further including forming a local interconnect in another of the plurality of gate trenches directly adjacent to the one of the plurality of gate trenches.

Example embodiment 19: The method of example embodiment 18, wherein forming the local interconnect and forming the conductive material in the voids between the dielectric layer and the sidewalls of the one of the plurality of gate trenches is performed at the same time using a same material.

Example embodiment 20: The method of example embodiment 15, 16, 17, 18 or 19, further including forming an anode and cathode pair electrically coupled to the conductive material in the voids between the dielectric layer and the sidewalls of the one of the plurality of gate trenches. 

What is claimed is:
 1. A method of fabricating an integrated circuit structure, the method comprising: forming a plurality of gate trenches in an inter-layer dielectric (ILD) layer above a self-aligned gate edge (SAGE) structure above a substrate; forming a blocking layer in the plurality of gate trenches; removing the blocking layer from one of the plurality of gate trenches, wherein removing the blocking layer comprises leaving slivers of a residual portion of the blocking layer along sidewalls of the one of the plurality of gate trenches; forming a dielectric layer in the one of the plurality of gate trenches and adjacent to the slivers of the residual portion of the blocking layer; removing the slivers of the residual portion of the blocking layer to provide voids between the dielectric layer and the sidewalls of the one of the plurality of gate trenches; and forming a conductive material in the voids between the dielectric layer and the sidewalls of the one of the plurality of gate trenches.
 2. The method of claim 1, wherein forming a conductive material in the voids between the dielectric layer and the sidewalls of the one of the plurality of gate trenches comprises using an atomic layer deposition (ALD) process.
 3. The method of claim 2, wherein forming the conductive material comprises forming a layer of titanium nitride (TiN) or tungsten (W).
 4. The method of claim 1, further comprising: forming a local interconnect in another of the plurality of gate trenches directly adjacent to the one of the plurality of gate trenches.
 5. The method of claim 4, wherein forming the local interconnect and forming the conductive material in the voids between the dielectric layer and the sidewalls of the one of the plurality of gate trenches is performed at the same time using a same material.
 6. The method of claim 1, further comprising: forming an anode and cathode pair electrically coupled to the conductive material in the voids between the dielectric layer and the sidewalls of the one of the plurality of gate trenches.
 7. A method of fabricating an integrated circuit structure, the method comprising: forming a plurality of semiconductor fins protruding through a trench isolation region above a substrate; forming a first gate structure over a first of the plurality of semiconductor fins; forming a second gate structure over a second of the plurality of semiconductor fins; forming a gate edge isolation structure laterally between and in contact with the first gate structure and the second gate structure, the gate edge isolation structure on the trench isolation region and extending above an uppermost surface of the first gate structure and the second gate structure; and forming a metal fuse on the gate edge isolation structure.
 8. The method of claim 7, wherein the metal fuse is electrically coupled to one or both of the first gate structure and the second gate structure.
 9. The method of claim 8, wherein the metal fuse is electrically coupled to one or both of the first gate structure or the second gate structure by a corresponding local interconnect on the first gate structure or the second gate structure.
 10. The method of claim 7, wherein the metal fuse comprises a pair of metal slivers along sidewalls of a trench in an inter-layer dielectric (ILD) layer above the gate edge isolation structure.
 11. The method of claim 10, wherein the metal fuse further comprises a dielectric plug in the trench and adjacent to the pair of metal slivers.
 12. The method of claim 10, wherein the pair of metal slivers comprises titanium nitride (TiN) or tungsten (W).
 13. The method of claim 7, further comprising: forming an anode and cathode pair electrically coupled to the metal fuse.
 14. A method of fabricating an integrated circuit structure, the method comprising: forming one or more semiconductor devices comprising a plurality of gate structures above a substrate; forming a local interconnect on and electrically coupling two or more of the plurality of gate structures, the local interconnect having a bottommost surface; and forming a metal fuse laterally adjacent to the local interconnect, the metal fuse having a bottommost surface co-planar with a bottommost surface of the local interconnect.
 15. The method of claim 14, wherein the local interconnect and the metal fuse comprise a same metal.
 16. The method of claim 14, wherein the local interconnect and the metal fuse are on a same self-aligned gate edge (SAGE) isolation structure.
 17. The method of claim 16, wherein the SAGE isolation structure comprises an upper dielectric layer on a lower dielectric layer, the upper dielectric layer having a greater dielectric constant than the lower dielectric layer.
 18. The method of claim 16, wherein the SAGE isolation structure comprises a vertical seam centered within the SAGE isolation structure.
 19. The method of claim 14, further comprising: forming a wide gate edge isolation structure and a narrow gate edge isolation structure, wherein the metal fuse is on the wide gate edge isolation structure.
 20. The method of claim 14, wherein the one or more semiconductor devices comprises one or more semiconductor fins. 